Abstract:
Purpose – Low temperature co-fired ceramics (LTCC) technology-based micro-hotplates are of immense interest owing to their ruggedness, high
temperature stability and reliability. The purpose of this paper is to study the role of thermal mass of LTCC-based micro-hotplates on the power
consumption and temperature for gas-sensing applications.
Design/methodology/approach – The LTCC micro-hotplates with different thicknesses are designed and fabricated. The role of thermal mass on
power consumption and temperature of these hotplates are simulated and experimentally studied. Also, a comparison study on the performance of
LTCC and alumina-based hotplates of equivalent thickness is done. A thick film-sensing layer of tin oxide is coated on LTCC micro-hotplate and
demonstrated for the sensing of commercial liquefied petroleum gas.
Findings – It is found from both simulation and experimental studies that the power consumption of LTCC hotplates was decreasing with the
decrease in thermal mass to attain the same temperature. Also, the LTCC hotplates are less power-consuming than alumina-based one, owing to
their superior thermal characteristics (low thermal conductivity, 3.3 W/ [m-K]).
Originality/value – This study will be beneficial for designing hotplates based on LTCC technology with low power consumption and better stability
for gas-sensing applications.
